1 SIMS (Secondary Ion Mass Spectrometry) Analysis
SIMS have high sensitivity on the impurities detection capability, almost of elements detection limit can be achieved PPM level, so that widely applied on the semiconductor and thin-film material analysis.
2 Key Analysis Items
- Metal diffusion Test
- Surface contamination analysis
- Adsorption Test
- Corrosion Analysis
- Shallow and Supper shallow Surface Analysis
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